Title Labile Hyperbranched Polymers Used as Nanopore Forming Agents in Polymeric Dielectrica
Date 01.02.2002
Number 9887
Abstract Hyperbranched polyesters containing labile triazene units in the main chain have been synthesized and characterized. These structure decompose photochemically upon UV irradiation and thermally above 160°C. Homogeneous incorporation of these globular, functional polymers in thermostabile polymer matrices (polyimides and BCB polymers) was possible. Smooth films from blends of thermolabile matrix and up to 50% hyperbranched polymers could be prepared and have been studied as insulating material in microelectronic multilayer applications.
Publisher Macromolecular Symposia
Citation Macromolecular Symposia 177 (2002) 147-154
Authors Voit, B. ; Eigner, M. ; Estel, K. ; Wenzel, C. ; Bartha, J.W.
Tags templating nanoporosity organosilicates ablation

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