Authors
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Voit, B. ; Eigner, M. ; Estel, K. ; Wenzel, C. ; Bartha, J.W.
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Title
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Labile Hyperbranched Polymers Used as Nanopore Forming Agents in Polymeric Dielectrica
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Date
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01.02.2002
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Number
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9887
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Abstract
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Hyperbranched polyesters containing labile triazene units in the main chain have been synthesized and characterized. These structure decompose photochemically upon UV irradiation and thermally above 160°C. Homogeneous incorporation of these globular, functional polymers in thermostabile polymer matrices (polyimides and BCB polymers) was possible. Smooth films from blends of thermolabile matrix and up to 50% hyperbranched polymers could be prepared and have been studied as insulating material in microelectronic multilayer applications.
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Publisher
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Macromolecular Symposia
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Wikidata
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Citation
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Macromolecular Symposia 177 (2002) 147-154
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DOI
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https://doi.org/10.1002/1521-3900(200201)177:1<147::AID-MASY147>3.0.CO;2-O
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Tags
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templating nanoporosity organosilicates ablation
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