Rotating-compensator multiwavelenght ellipsometer M-2000VI
(J.A. Woollam Co., Inc.)
It is a Diode Array Rotating Compensator Ellipsometer (DARCETM) in PCSA configuration equipped with an automatic computer-controlled goniometer and a horizontally mounted sample stage. The angle of incidence can be set continuously in the range from 45 to 90°. The light source is a 50-W QHT lamp. The M-2000VI measures 500 wavelengths simultaneously covering the spectral range from 370 1700 nm. Accurate measurements over the full Δ and Ψ range can be acquired (Δ= 0° - 360°; Ψ= 0° - 90°). Typical measurement times range between 1 and 5 seconds.