Publikationsliste
| Authors | Windrich, F. ; Malanin, M. ; Eichhorn, K.-J. ; Voit, B. ; Lang, K. D. |
|---|---|
| Title | Low-temperature photosensitive polyimide processing for use in 3D integration technologies |
| Date | 14.10.2014 |
| Number | 44443 |
| Abstract | No abstract. |
| Publisher | Materials Research Society symposium proceedings |
| Wikidata | |
| Citation | Materials Research Society symposium proceedings 1692 (2014) Abs. 520 |
| DOI | https://doi.org/10.1557/opl.2014.520 |
| Tags | polymer kinetics microelectronics |