Imaging Ellipsometry

EP3 Imaging Ellipsometer (Nanofilm Technologie GmbH)

Characterization of micropatterned polymer films by imaging ellipsometry (PDF file, 531 KB)

It is a single wavelength (633 nm HeNe), multiple-angle Nulling instrument in PCSA configuration. The imaging part consists of a long distance objective, CCD camera and image scanner. The field-of-view is about 0.4 mm, and the lateral resolution about 2 µm.