Imaging Ellipsometry

EP3 Imaging Ellipsometer (Nanofilm Technologie GmbH)

The EP3 (ACCURION, Göttingen, Germany) is a single wavelength (633 nm HeNe-laser), multiple-angle Nulling instrument in PCSA configuration. The imaging part consists of a long distance objective, CCD camera and image scanner. The field-of-view is about 0.4 mm, and the lateral resolution about 2 μm.