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Authors Kubec, A. ; Maser, J. ; Formanek, P. ; Franke, V. ; Braun, S. ; Gawlitza, P. ; Leson, A. ; Macrander, A.
Title Fabrication and efficiency measurement of a Mo/C/Si/C three material system multilayer Laue lens
Date 27.03.2017
Number 52463
Abstract In this letter, we report on the manufacturing of a multilayer Laue lens (MLL) consisting of a multilayer stack with three materials: molybdenum and silicon as the absorber and spacer layer, respectively, and carbon as transition layers. The design has four layers per period: Mo/C/Si/C. It yields 6000 zones and provides an aperture of 50·µm. This allows the MLL structure to accept a large portion of the coherent part of the beam and to achieve a small spot size. The MLL deposition was made by magnetron sputtering at the Fraunhofer IWS, and the sectioning was done by laser cutting and subsequent focused ion beam milling to a thickness that provides a good efficiency for a photon energy of 12·keV. The diffraction efficiency as a function of the tilting angle has been measured at beamline 1-BM of the Advanced Photon Source. An efficiency of almost 40% has been achieved. This shows that the material system performs well compared to MLLs made of two-materials and that it is in excellent agreement with the numerically calculated efficiency for a comparable molybdenum/silicon bilayer system lens. We conclude that the three material system offers high efficiencies and is advantageous for stress reduction in MLLs.
Publisher Applied Physics Letters
Wikidata
Citation Applied Physics Letters 110 (2017) Art.No. 111905
DOI https://doi.org/10.1063/1.4978610
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