Hinrichs, K. ; Eichhorn, K.-J.
Combined infrared and visible spectroscopic ellipsometry study of thin polymer layers

Thin polymer layers on solid substrates are of high technological importance due to their increasing potential for applications in electronics, sensors, nanotechnology and biotechnology. Appropriate characterisation methods are necessary for the design and analysis of devices made using such materials. This review article focuses upon presenting the many analytical possibilities for quantitative evaluation of the optical constants and thickness of polymer layers by combined application of spectroscopic ellipsometry (SE) in the visible (vis) and infrared (IR) spectral range.

Quelle
Spectroscopy Asia 4

Seiten
6-9

DOI
http://www.spectroscopyasia.com

Erschienen am
May 2008